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1

An optimization of tungsten plug chemical mechanical polishing (CMP) using different consumables

Woo-Sun Lee, Sang-Yong Kim, Yong-Jin Seo, Jong-KooK Lee

Journal:

Journal of Materials Science: Materials in Electronics

Year:

2001

Language:

english

File:

PDF, 149 KB

english, 2001

2

Effects of slurry filter size on the chemical mechanical polishing (CMP) defect density

Yong-Jin Seo, Sang-Yong Kim, Yeon-Ok Choi, Yong-Taek Oh, Woo-Sun Lee

Journal:

Materials Letters

Year:

2004

Language:

english

File:

PDF, 626 KB

english, 2004

3

Effects of STI-fill thickness on the CMP process defects

Yong-Jin Seo, Gi-Uk Kim, Woo-Sun Lee

Journal:

Microelectronic Engineering

Year:

2004

Language:

english

File:

PDF, 406 KB

english, 2004

4

Optimization of pre-metal Dielectric (PMD) materials

Yong-Jin Seo, Sang-Yong Kim, Woo-Sun Lee

Journal:

Journal of Materials Science: Materials in Electronics

Year:

2001

Language:

english

File:

PDF, 666 KB

english, 2001

5

Electromigration characteristics in dual-damascene copper interconnects by difference of via structures

Nam-Hoon Kim, Sang-Yong Kim, Woo-Sun Lee, Eui-Goo Chang

Journal:

Microelectronic Engineering

Year:

2007

Language:

english

File:

PDF, 1.76 MB

english, 2007

6

Hybrid health monitoring of prestressed concrete girder bridges by sequential vibration-impedance approaches

Jeong-Tae Kim, Jae-Hyung Park, Dong-Soo Hong, Woo-Sun Park

Journal:

Engineering Structures

Year:

2010

Language:

english

File:

PDF, 7.99 MB

english, 2010

7

Prevention of plasma-induced damage during HDP–CVD deposition

Sang-Yong Kim, Woo-Sun Lee, Yong-Jin Seo

Journal:

Journal of Materials Processing Technology

Year:

2004

Language:

english

File:

PDF, 842 KB

english, 2004

8

Experimental investigation on the relationship between sluice caisson shape of tidal power plant and the water discharge capability

Dal Soo Lee, Sang-Ho Oh, Jin-Hak Yi, Woo-Sun Park, Hyu-Sang Cho, Duk-Gu Kim, Hyun-Min Eom, Suk-Jin Ahn

Journal:

Renewable Energy

Year:

2010

Language:

english

File:

PDF, 1.18 MB

english, 2010

9

Structural and surface properties of NiCr thin films prepared by DC magnetron sputtering under variation of annealing conditions

Yong Kwon, Nam-Hoon Kim, Gwang-Pyo Choi, Woo-Sun Lee, Yong-Jin Seo, Jinseong Park

Journal:

Microelectronic Engineering

Year:

2005

Language:

english

File:

PDF, 581 KB

english, 2005

10

Optimization of post-CMP cleaning process for elimination of CMP slurry-induced metallic contaminations

Yong-Jin Seo, Woo-Sun Lee, Sang-Yong Kim, Jin-Sung Park, Eui-Goo Chang

Journal:

Journal of Materials Science: Materials in Electronics

Year:

2001

Language:

english

File:

PDF, 1.01 MB

english, 2001

11

Non-selenization method using sputtering deposition with a CuSe2target for CIGS thin film

Nam-Hoon Kim, Seongha Oh, Woo-Sun Lee

Journal:

Journal of the Korean Physical Society

Year:

2012

Language:

english

File:

PDF, 170 KB

english, 2012

12

Improvement of the surface roughness and sensing properties of cerium dioxide thin film by chemical mechanical polishing

Kim, Nam-Hoon, Ko, Pil-Ju, Lee, Woo-Sun

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

2008

Language:

english

File:

PDF, 642 KB

english, 2008

13

Optimization of nitride films for linear pre-metal dielectric process

Nam-Hoon Kim, Yong-Jin Seo, Sung-Woo Park, Do-Won Lee, Sang-Yong Kim, Eui-Goo Chang, Woo-Sun Lee

Journal:

Microelectronic Engineering

Year:

2005

Language:

english

File:

PDF, 239 KB

english, 2005

14

Temperature effects of pad conditioning process on oxide CMP: Polishing pad, slurry characteristics, and surface reactions

Nam-Hoon Kim, Yong-Jin Seo, Woo-Sun Lee

Journal:

Microelectronic Engineering

Year:

2006

Language:

english

File:

PDF, 649 KB

english, 2006

15

Improvement of TEOS-chemical mechanical polishing performance by control of slurry temperature

Nam-Hoon Kim, Pil-Ju Ko, Yong-Jin Seo, Woo-Sun Lee

Journal:

Microelectronic Engineering

Year:

2006

Language:

english

File:

PDF, 360 KB

english, 2006

16

CMP characteristics and optical property of ITO thin film by using silica slurry with a variety of process parameters

Gwon-Woo Choi, Kang-Yeon Lee, Nam-Hoon Kim, Jin-Seong Park, Yong-Jin Seo, Woo-Sun Lee

Journal:

Microelectronic Engineering

Year:

2006

Language:

english

File:

PDF, 226 KB

english, 2006

17

Erratum to: “Temperature effects of pad conditioning process on oxide CMP: Polishing pad, slurry characteristics, and surface reactions” [Microelect. Eng. 83 (2006) 362–370]

Nam-Hoon Kim, Yong-Jin Seo, Woo-Sun Lee

Journal:

Microelectronic Engineering

Year:

2007

Language:

english

File:

PDF, 251 KB

english, 2007

18

Platinum chemical mechanical polishing (CMP) characteristics for high density ferroelectric memory applications

Nam-Hoon Kim, Pil-Ju Ko, Seock Koo Kang, Woo-Sun Lee

Journal:

Microelectronic Engineering

Year:

2007

Language:

english

File:

PDF, 904 KB

english, 2007

19

Creation mechanism of metal depression in sputtering process for aluminum interconnects

Sang-Yong Kim, Kang-Yeon Lee, Dong-You Choi, Nam-Hoon Kim, Woo-Sun Lee, Eui-Goo Chang

Journal:

Microelectronic Engineering

Year:

2007

Language:

english

File:

PDF, 1.08 MB

english, 2007

20

Chemical mechanical polishing performances by filtering and retreatment of used silica abrasives slurry

Yong-Jin Seo, Sung-Woo Park, Nam-Hoon Kim, Eui-Goo Chang, Woo-Sun Lee

Journal:

Microelectronic Engineering

Year:

2005

Language:

english

File:

PDF, 474 KB

english, 2005

21

Electrochemical corrosion effects and chemical mechanical polishing characteristics of tungsten film using mixed oxidizers

Yong-Jin Seo, Nam-Hoon Kim, Woo-Sun Lee

Journal:

Microelectronic Engineering

Year:

2006

Language:

english

File:

PDF, 349 KB

english, 2006

22

Influences of thickness-uniformity and surface morphology on the electrical and optical properties of sputtered CdTe thin films for large-area II–VI semiconductor heterostructured solar cells

Youn-Ok Choi, Nam-Hoon Kim, Ju-Sun Park, Woo-Sun Lee

Journal:

Materials Science and Engineering: B

Year:

2010

Language:

english

File:

PDF, 1.04 MB

english, 2010

23

Chemical mechanical polishing (CMP) mechanisms of thermal SiO2 film after high-temperature pad conditioning

Nam-Hoon Kim, Pil-Ju Ko, Gwon-Woo Choi, Yong-Jin Seo, Woo-Sun Lee

Journal:

Thin Solid Films

Year:

2006

Language:

english

File:

PDF, 624 KB

english, 2006

24

Chemical mechanical polishing of BTO thin film for vertical sidewall patterning of high-density memory capacitor

Nam-Hoon Kim, Pil-Ju Ko, Yong-Jin Seo, Woo-Sun Lee

Journal:

Thin Solid Films

Year:

2006

Language:

english

File:

PDF, 289 KB

english, 2006

25

Chemical mechanical polishing characteristics in (Bi,La)Ti3O12 damascene process for high-density ferroelectric memories

Nam-Hoon Kim, Sang-Hun Shin, Pil-Ju Ko, Woo-Sun Lee

Journal:

Thin Solid Films

Year:

2007

Language:

english

File:

PDF, 547 KB

english, 2007

26

Reduction of process defects using a modified set-up for chemical mechanical polishing equipment

Yong-Jin Seo, Sang-Yong Kim, Woo-Sun Lee

Journal:

Microelectronic Engineering

Year:

2003

Language:

english

File:

PDF, 1.01 MB

english, 2003

27

Advantages of point of use (POU) slurry filter and high spray method for reduction of CMP process defects

Yong-Jin Seo, Sang-Yong Kim, Woo-Sun Lee

Journal:

Microelectronic Engineering

Year:

2003

Language:

english

File:

PDF, 560 KB

english, 2003

28

Optical properties of GaSe:Er3+single crystals

Woo-Sun Lee, Nam-Oh Kim, Byeung-In Kim

Journal:

Journal of Materials Science Letters

Year:

1996

Language:

english

File:

PDF, 184 KB

english, 1996

29

Rhabdomyoma of the orbit: a case report

Jae Myung, In-One Kim, Jung-Eun Chun, Woo-Sun Kim, Kyung Yeon, Byung-Kyu Jo, Chong Kim

Journal:

Pediatric Radiology

Year:

2002

Language:

english

File:

PDF, 168 KB

english, 2002

30

Effects of conditioning temperature on polishing pad for oxide chemical mechanical polishing process

Nam-Hoon Kim, Gwon-Woo Choi, Jin-Seong Park, Yong-Jin Seo, Woo-Sun Lee

Journal:

Microelectronic Engineering

Year:

2005

Language:

english

File:

PDF, 1.25 MB

english, 2005

31

Influence of dispersed-alumina particle size on the fracture toughness of 3 mol% yttria-stabilized zirconia polycrystals (3Y-TZP)

Jong-Kook Lee, Min-Jung Kim, Eun-Gu Lee, Woo-Sun Lee

Journal:

Journal of Materials Science Letters

Year:

2002

Language:

english

File:

PDF, 716 KB

english, 2002

32

Laser-induced doping of aluminum into a cadmium telluride thin film: Electrical and optical properties

Nam-Hoon Kim, Kuk Do Myung, Geum-Bae Cho, Woo-Sun Lee

Journal:

Journal of the Korean Physical Society

Year:

2012

Language:

english

File:

PDF, 227 KB

english, 2012

33

Chemical mechanical polishing and electrochemical characteristics of tungsten using mixed oxidizers with hydrogen peroxide and ferric nitrate

Yong-Jin Seo, Nam-Hoon Kim, Woo-Sun Lee

Journal:

Materials Letters

Year:

2006

Language:

english

File:

PDF, 395 KB

english, 2006

34

Adenoid cystic carcinoma of the Bartholin's gland: Report of two cases and review of the literature

Sook-Young Vivian Yang, Jeong-Won Lee, Woo-Sun Kim, Kyoung-Lan Jung, Sun-Joo Lee, Je-Ho Lee, Duk-Soo Bae, Byoung-Gie Kim

Journal:

Gynecologic Oncology

Year:

2006

Language:

english

File:

PDF, 196 KB

english, 2006

35

Gastric adenomyoma mimicking gastric duplication cyst in a 5-year-old girl

Sei-Hee Min, Hyun-Young Kim, Soo-Hong Kim, Sung-Eun Jung, Kwi-Won Park, Woo-Sun Kim, Sung-Hye Park

Journal:

Journal of Pediatric Surgery

Year:

2012

Language:

english

File:

PDF, 1.25 MB

english, 2012

36

Electrical and optical properties of sputter-deposited cadmium sulfide thin films optimized by annealing temperature

Nam-Hoon Kim, Seung-Han Ryu, Hyo-Sup Noh, Woo-Sun Lee

Journal:

Materials Science in Semiconductor Processing

Year:

2012

Language:

english

File:

PDF, 432 KB

english, 2012

37

Quantitative analysis of changes in salivary mutans streptococci after orthodontic treatment

Jung, Woo-Sun, Kim, Ho, Park, So-Yoon, Cho, Eun-Jung, Ahn, Sug-Joon

Journal:

American Journal of Orthodontics and Dentofacial Orthopedics

Year:

2014

Language:

english

File:

PDF, 360 KB

english, 2014

38

Gender Differences in Dentofacial Characteristics of Adult Patients With Temporomandibular Disc Displacement

Kwon, Ho-Beom, Kim, Ho, Jung, Woo-Sun, Kim, Tae-Woo, Ahn, Sug-Joon

Journal:

Journal of Oral and Maxillofacial Surgery

Year:

2013

Language:

english

File:

PDF, 425 KB

english, 2013

39

[IEEE 5th International Conference on Properties and Applications of Dielectric Materials - Seoul, South Korea (25-30 May 1997)] Proceedings of 5th International Conference on Properties and Applications of Dielectric Materials - The high resistivity properties of tungsten nitride thin films deposited by RF&DC sputtering

Woo-Sun Lee,, Yong-Ho Chung,, Nam-Oh Kim,

Year:

1997

Language:

english

File:

PDF, 187 KB

english, 1997

40

Chemical mechanical planarization characteristics of WO[sub 3] thin film for gas sensing

Seo, Yong-Jin, Kim, Nam-Hoon, Chang, Eui-Goo, Park, Jinseong, Ko, Pil-Ju, Lee, Woo-Sun

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

2005

Language:

english

File:

PDF, 640 KB

english, 2005

41

Removal characteristics of hillock on SnO[sub 2] thin film by chemical mechanical polishing process

Seo, Yong-Jin, Kim, Nam-Hoon, Chang, Eui-Goo, Park, Jinseong, Choi, Gwon-Woo, Lee, Woo-Sun

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

2005

Language:

english

File:

PDF, 418 KB

english, 2005

42

Influence of a post–chemical mechanical polishing cleaning process on the ferroelectric properties of a Pb(Zr,Ti)O[sub 3] thin film capacitor fabricated by the damascene process

Kim, Nam-Hoon, Jun, Young-Kil, Ko, Pil-Ju, Lee, Woo-Sun

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

2008

Language:

english

File:

PDF, 657 KB

english, 2008

43

AMORPHOUS COPPER DISELENIDE THIN FILMS DOPED WITH GALLIUM AND INDIUM BY LASER-INDUCED DOPING

KIM, NAM-HOON, JEON, JI EUN, CHO, GEUM-BAE, LEE, WOO-SUN, CHOI, DONG-YOU

Journal:

International Journal of Modern Physics B

Year:

2013

Language:

english

File:

PDF, 288 KB

english, 2013

44

Motor-Current-Based Real-Time End Point Detection of Shallow-Trench-Isolation Chemical Mechanical Polishing Process Using High-Selectivity Slurry

Seo, Yong-Jin, Lee, Woo-Sun, Park, Jin-Seong, Kim, Sang-Yong

Journal:

Japanese Journal of Applied Physics

Year:

2003

Language:

english

File:

PDF, 198 KB

english, 2003

45

Laser-Induced Indium-Diffusion into Cadmium Sulfide Thin Film for Solar Cell Applications

Kim, Nam-Hoon, Myung, Kuk Do, Lee, Woo-Sun

Journal:

Chinese Physics Letters

Year:

2012

Language:

english

File:

PDF, 54 KB

english, 2012

46

Low-temperature, rapid thermal annealing of CIS thin films deposited by using a co-sputtering process with in and CuSe2targets

Kim, Nam-Hoon, Sung, Back-Sub, Jun, Young-Kil, Chung, Dong Hyun, Lee, Woo-Sun

Journal:

Journal of the Korean Physical Society

Year:

2015

Language:

english

File:

PDF, 368 KB

english, 2015

47

Evaluation of Vibration Characteristics of an Existing Harbor Caisson Structure Using Tugboat Impact Tests and Modal Analysis

Yi, Jin-Hak, Park, Woo-Sun, Lee, So-Young, Huynh, Thanh-Canh, Kim, Jeong-Tae, Seo, Chun-Kyo

Journal:

International Journal of Distributed Sensor Networks

Year:

2013

Language:

english

File:

PDF, 1.89 MB

english, 2013

48

Effects of Silica Slurry Temperature on Chemical Mechanical Polishing for Tetraethyl Orthosilicate Film

Kim, Nam-Hoon, Seo, Yong-Jin, Lee, Woo-Sun

Journal:

Japanese Journal of Applied Physics

Year:

2005

Language:

english

File:

PDF, 2.70 MB

english, 2005

49

Co-Sputtered and Rapid-Thermal-Annealed CIAS Thin Films Using CuSe2/In/Al Triple Targets of Varying In/Al Compositions

Kim, Nam-Hoon, Jun, Young-Kil, Lee, Woo-Sun

Journal:

Journal of Nanoscience and Nanotechnology

Year:

2016

Language:

english

File:

PDF, 588 KB

english, 2016

50

[IEEE 2008 17th IEEE International Symposium on the Applications of Ferroelectrics (ISAF) - Santa Re, NM, USA (2008.02.23-2008.02.28)] 2008 17th IEEE International Symposium on the Applications of Ferroelectrics - Electrical properties of Pb(Zr,Ti)O3/CeO2/Si MFIS structure fabricated by chemical mechanical polishing (CMP) damascene process

Kim, Nam-Hoon, Ko, Pil-Ju, Lee, Woo-Sun

Year:

2008

Language:

english

File:

PDF, 1.99 MB

english, 2008